Lam Research 852-011061-103 Lower Chamber Assembly 4420 Etcher Untested Spare 12 MER L #02 Installed

12 MER L #02 Installed Components

Electrical Diagram No: 4S066-013-2

Reseller Lot of 2 This Aerotech ES13713-3 is used working surplus

Part No: 1210R-DTH

Part No: E17145790 This Varian E17145790 Source Housing Liner Shield Reseller Lot of 2 is used working surplus

Lam Research 852-011061-103 Lower Chamber Assembly 4420 Etcher Untested Spare 12 MER L #02 InstalledLam Research 852 011061 103 Lower Chamber Assembly 4420 Etcher Untested Spare Part No: 852 011061 103 Removed from a Lam Research 4420 Rainbow Plasma Etcher System Untested As Is Installed Components Part No: 715 011665 004, Cap, Lower Electrode, 4 Domed Part No: 716 011624 001, Ring, Ceramic Part No: 716 011570 001, Filler, Orice, W C, Ceramic Part No: 715 011035 001, Plate, Lower End (Reaction Chamber) Part No: 716 011623 001, Ring, Clamp Part No: